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日本YAMATO大氣壓等離子清洗機APPC-400Y

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日本YAMATO大氣壓等離子清洗機APPC-400Y :

Plasma apparatus-(Atmosphericpressure plasma cleaner)

APPC-400Y
System Outline
ThisEquipment is Atmosphere Plasma for cleaningsamplesurface. Easy to make In-Line system with otherEquipment.UnifyandSeparation Type available, Also, Two kindsofElectronics(Insertion and Spout) type available.
Feature
Does not need Vacuum systemsuchasVacuum pump and Vacuum chamber. Reaction gas use He,Ar andO2mixinggas for cleaning sample surface.
Sample
Sanplesize : Any size okay(W) x 45(D) x Max. 15(T)mm
Equipment Function
Loading Sample Useing conveyor or Armchuckforloading sample Sample are continuanceloadingtoelectrode. Un-load sample. Go to next process
Automatic andManualoperationselectable. Touch panel operation Two Electrode can build inforheavydirt cleaning of sample surface. Easy to install and easytomakeIn-Line system. Electrode and Main unitcanbeseparately. Also, One controller cancontrolTwoElectrode.
ExternalDimension	Systemstructure
Unify type : W800 xL700xH1200mm Separately type : W800 xL700xH950mm	Electrode unit RF generator unit (Inthecontrolunit) Gas flow unit (Inthecontrolunit) Touch panel (On controlunit) Cooling unit (Option) Loading andUn-loadingunit(Option)
Electrodeunit	Gasflowunit
Two parallel flat plate. Gas input hole for fill up mixing gas (He and Ar). Also, water cooling port. (IN and OUT)	Mass flow controller system Ar : Max. 5L/min He : Max. 5L/min Oxygen : Max. 200mL/min
Electrode spec. Electrode : Aluminum Up to W300xL50x H20mm Water Cooling type. Around electrode matirial:Quartzglass
Controlunit	Powersupply
Touch panelandprogrammablecontroller (PLC) 1. Set process recip Gas flow RF power oading speed (Conveyorspeedetc.) 2. Process monitor Gas flow, RF power Error	3 phase AC220V 25A
	Safetymechanism
	This Equipment builtinsafetyfunction system. Builit in safetycoverforElectrode