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UHF-120高頻顯微激光測振儀

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產品簡介

UHF-120高頻顯微激光測振儀 UHF-120 超高頻激光測振儀的顯著特點是其具有極大的測量帶寬,可高分辨率對高達 2.4 GHz 的面外振動進行。UHF-120具有小于1μm的高橫向分辨率,這尤其對聲表面波 (SAW) 分量的表面波可視化起決定性作用。另一個應用涉及驗證體聲波 (BAW) 分量和超高頻率范圍內成像。UHF-120測量結果包含大帶寬范圍內的振動信息,可一次性快速地識別諧振頻率。通過安裝在軟件控制的高精度xy 工作臺的樣品移動,完成全場測量。光學振動測量,對樣品沒有任何附加質量影響高達 2.4 GHz 的超聲頻振動分析詳細顯示振型高振幅分辨率適應性激光功率,保護敏感樣品和表面高橫向分辨率,用于測量短波長兼容普通 MEMS 探針站

詳細介紹

Next generation micro- and nanotechnology devices such as micro-acoustic filters, RF-MEMS and ultrasonic transducers involve high frequency mechanical vibration and wave propagation approaching GHz frequencies. For microscopic devices operating at these frequencies only sophisticated optical techniques can provide the spatial resolution, zero mass loading and vibration sensitivity required for proper characterization.  


UHF-120 Ultra High Frequency Vibrometer captures real-time, out-of-plane motions of micro devices with picometer sensitivity and a measurement bandwidth of up to 2.4 GHz. Options provide for either a manual point-by-point system (VibSoft) or an automated scanning system (PSV Soft)  capturing and analyzing deflection shapes.


Technical data


Metrological specifications


Max. vibration frequency

600 MHz

1.2 GHz (optional)

2.4 GHz (optional)


Maximum measurement time

3.906 ms

3.906 ms

1.963 ms


Max. sample rate

40 GSa/s


Amplitude resolution of   UHF-A-120
  data acquisition

8 bit



Displacement-amplitude   resolution 

 1.5 pm at 2.5 kHz resolution bandwidth   (corresponds to 30 fm/√(Hz))


Max. number of FFT lines
  for a vibration spectrum

2,343,750

4,687,500

2,343,750


Best frequency resolution

256 Hz                             

 256 Hz                          

    512 Hz


Number of reference channels  

1




Optical specifications


Laser type                                               

  solid state


Laser wavelength  

 532 nm, visible green beam


Laser spot diameter 

 < 2.5 µm (1/e2) 1


Laser output  

  < 5 mW 2


Laser protection class  

Class 3R


Camera type   

1/4" CCD   color board camera


Active pixels (H x V)

510 x 492


Illumination                                              

integrated,   bright-field


Objective                                                 

 20x microscope objective 3


Field of view                                           

0.71 mm x 0.55   mm (aprox.)


Working distance 

  20 mm





UHF-120 system   configurations



UHF-120
  Ultra High Frequency Vibrometer

UHF-120-SV
  Scanning Ultra High Frequency Vibrometer


Vibrometer system

UHF-I-120 Sensor Head
  UHF-E-120 Controller


Data acquisition &
  Data management system

UHF-A-121 LeCroy   Oscilloscope and Digitizer
  PC-I UHF 19" Industrial PC, 24" (61 cm) TFT monitor, keyboard and   mouse


Software

VibSoft system software

PSV system software


XY-Stage

manual stage (optional)

A-PST-200P XY Precision   Positioning Stage
  A-CTR-110 Axis Controller
  A-JST-0001 Joystick


Accessories

A-CAB-BAS System Cabinet for   19" electronic components
  A-MOB-020X 20x Microscope Objective 3
  UHF-A-SAW SAW Filter test sample
  A-LSG-0532 Laser Safety Goggles
  Hardware manual, software manual and theory manual





UHF-I-120 Sensor Head


Dimensions [W x D x H]                          

158 x 129 x 376 mm


Weight                                                      

11.4 kg


Specification of motion axes


XY-Stage

A-SPK-0002
  Sample Positioning Kit (optional)

A-PST-200P XY
  Precision Positioning Stage


Dimensions [W x D x H]

161 x 158 x 116 mm

310 x 310 x 135 mm


Weight

1.8 kg

21.6 kg


Lateral travel range

13 mm x 13 mm, manually   actuated

200 mm x 200 mm, motorized


Repeatability   (bi-directional)

N/A

+/- 0.5 µm


Tip-Tilt range

+/- 2.5°, manually actuated

+/- 2.5°, manually actuated


Load capacity

0.9 kg

10.0 kg


General specifications


Power                                                  

 100 VAC… 240 VAC ±10%, 50/60 Hz 500 VA   (typical)


Environmental   conditions                       

Operating temperature: +18   °C … +30 °C (64.4 °F … 86 °C);
  Storage temperature: -10 °C … +65 °C (14 °F … 149 °F);
  Relative humidity: max. 80%, non-condensing


Compliance with standards


Electrical safety                                        

Norm1: IEC/EN   61010-1:2011-07

Norm2: IEC/EN   61326-1:2013-07


Emission: FCC Class A,   IEC/EN 61000-3-2 and 61000-3-3


Immunity: IEC/EN 61000-4-2   to 61000-4-6 and IEC/EN 61000-4-11













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